English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
 Local TagsRelease HistoryDetailsSummary
  Quantitative evaluation of sputtering induced surface roughness in depth profiling of polycrystalline multilayers using auger electron spectroscopy

Wang, J. Y., Hofmann, S., Zalar, A., & Mittemeijer, E. J. (2003). Quantitative evaluation of sputtering induced surface roughness in depth profiling of polycrystalline multilayers using auger electron spectroscopy. Thin Solid Films, 444, 120-124.

Item is

 

show all hide all

Basic

show hide
Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2F04-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2F05-3
Genre: Journal Article

Files

show Files
hide Files
:
332.pdf (Abstract), 9KB
 
File Permalink:
-
Name:
332.pdf
Description:
-
OA-Status:
Visibility:
Restricted (Max Planck Institute for Intelligent Systems, MSMT; )
MIME-Type / Checksum:
application/pdf
Technical Metadata:
Copyright Date:
-
Copyright Info:
eDoc_access: INSTITUT
License:
-

Locators

show

Creators

show
hide
 Creators:
Wang, J. Y.1, Author           
Hofmann, S.1, Author           
Zalar, A., Author
Mittemeijer, E. J.1, 2, Author           
Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644              
2Universität Stuttgart, Institut für Materialwissenschaft, ou_persistent22              

Content

show
hide
Free keywords: MPI für Metallforschung; Abt. Mittemeijer;
 Abstract: -

Details

show
hide
Language(s): eng - English
 Dates: 2003
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 114061
 Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show
hide
Title: Thin Solid Films
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 444 Sequence Number: - Start / End Page: 120 - 124 Identifier: -