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Title:
Journal of Vacuum Science & Technology B
Alternative Title
:
J. Vac. Sci. Technol. B
Source Genre:
Journal
Creator(s):
Affiliations:
Publ. Info:
-
Pages:
-
Volume / Issue:
20 (4)
Sequence Number:
-
Start / End Page:
1368 - 1378
Identifier:
ISSN: 1071-1023