Periodic pillar structures by Si etching of multilayer GeSi/Si islands

Zhong, Z.; Katsaros, G.; Stoffel, M.; Costantini, G.; Kern, K.; Schmidt, O. G.; Jin-Phillipp, N. Y.; Bauer, G.

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Periodic pillar structures by Si etching of multilayer GeSi/Si islands

Zhong, Z., Katsaros, G., Stoffel, M., Costantini, G., Kern, K., Schmidt, O. G., et al. (2005). Periodic pillar structures by Si etching of multilayer GeSi/Si islands. Applied Physics Letters, 87(26): 263102.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-48A6-D Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-48A7-B

Genre: Journal Article

Alternative Title : Appl. Phys. Lett.

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Creators:
Zhong, Z.¹, Author
Katsaros, G.¹, Author
Stoffel, M.¹, Author
Costantini, G.¹, Author
Kern, K.¹, Author
Schmidt, O. G.¹, Author
Jin-Phillipp, N. Y.^{2, 3, 4}, Author
Bauer, G.⁵, Author

Affiliations:
1Max Planck Society, ou_persistent13
2Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497657
3Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497645
4Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497669
5Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany; Johannes Kepler Univ, Inst Semicond Phys, A-4040 Linz, Austria., ou_persistent22

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Free keywords: MPI für Metallforschung; MPI für Festkörperforschung; Abt. Dosch; Kern;

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Language(s): eng - English

Dates: Date issued: 2005-12-26

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 256539
ISI: 000234338700074

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Title: Applied Physics Letters

Alternative Title : Appl. Phys. Lett.

Source Genre: Journal

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Pages: - Volume / Issue: 87 (26) Sequence Number: 263102 Start / End Page: - Identifier: ISSN: 0003-6951