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  Nanopatterning by biological templating and laser direct writing in thin laser deposited films

Gorbunov, A. A., Mertig, M., Kirsch, R., Eichler, H., Pompe, W., & Engelhardt, H. (1997). Nanopatterning by biological templating and laser direct writing in thin laser deposited films. Applied Surface Science, 110, 621-625.

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 Creators:
Gorbunov, A. A., Author
Mertig, M., Author
Kirsch, R., Author
Eichler, H., Author
Pompe, W., Author
Engelhardt, H.1, Author              
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1External Organizations, ou_persistent22              

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Free keywords: Surface-layer.; Physical chemistry/chemical physics. Materials science and engineering.
 Abstract: We report on three alternative approaches to laser-supported sub-micro- and nanopatterning of ultrathin films. The inherent non-linearities of direct writing techniques can be used to fabricate structures far below the optical resolution limit. Due to the non-linear dependence of light absorption and reaction rate on film thickness and temperature (a) the lateral self-limitation of the oxidation reaction in ultrathin titanium films on a transparent heat insulating substrate in air can occur. The polarization of sharp conducting tips results in (b) near-field enhancement of the optical field in nanometer regions that allows diminishing of the effective size of the radiation source. The third approach (c) is based on the nanometer-period pattern transfer from a biomolecular template to a Pt/C overlayer deposited by cross-beam pulsed laser deposition. [References: 14]

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 Dates: 1997-02
 Publication Status: Published in print
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 Identifiers: eDoc: 318449
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Title: Applied Surface Science
Source Genre: Journal
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Pages: - Volume / Issue: 110 Sequence Number: - Start / End Page: 621 - 625 Identifier: -