System-level Modeling of MEMS

Bechtold, Tamara; Schrag, Gabriele; Feng, Lihong

doi:10.1002/9783527647132

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System-level Modeling of MEMS

Bechtold, T., Schrag, G., & Feng, L. (Eds.). (2013). System-level Modeling of MEMS. Weinheim: Wiley-VCH.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0013-87FA-0 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-AA65-B

Genre: Book

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Creators:
Bechtold, Tamara¹, Editor
Schrag, Gabriele², Editor
Feng, Lihong³, Editor

Affiliations:
1University of Freiburg, Germany, ou_persistent22
2Munich Univ. of Technology, Germany, ou_persistent22
3Computational Methods in Systems and Control Theory, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society, ou_1738141

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Language(s): eng - English

Dates: Date issued: 2013

Publication Status: Issued

Pages: 530 p.

Publishing info: Weinheim : Wiley-VCH

Table of Contents: -

Rev. Type: -

Identifiers: eDoc: 636594
DOI: 10.1002/9783527647132
ISBN: 978-3-527-31903-9

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Title: Advanced Micro and Nanosystems

Source Genre: Series

Creator(s):
Brand, Editor
Fedder, Editor
Hierold, Editor
Korvink, Editor
Tabata, Editor

Affiliations:
-

Publ. Info: -

Pages: - Volume / Issue: 10 Sequence Number: - Start / End Page: - Identifier: -