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  Silicon micromachining technology for sub-nanogram discrete mass resonant biosensors

Prescesky, S., Parameswaran, M., Rawicz, A., Turner, R. F. B., & Reichl, U. (1992). Silicon micromachining technology for sub-nanogram discrete mass resonant biosensors. Canadian Journal of Physics, 70(10-11), 1178-1183.

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 Creators:
Prescesky, S., Author
Parameswaran, M., Author
Rawicz, A., Author
Turner, R. F. B., Author
Reichl, Udo1, Author              
Affiliations:
1Other publications of the MPI staff, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society, ou_1738149              

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Language(s): eng - English
 Dates: 1992
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 119351
 Degree: -

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Title: Canadian Journal of Physics
Source Genre: Journal
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Publ. Info: Ottawa : NRC Research Press
Pages: - Volume / Issue: 70 (10-11) Sequence Number: - Start / End Page: 1178 - 1183 Identifier: ISSN: 0008-4204
CoNE: https://pure.mpg.de/cone/journals/resource/954925388202