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  Inspection Unit for Substrate, Inspection Apparatus for Substrate and Method of Substrate Inspection using the Same
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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0013-D355-0 Version Permalink: http://hdl.handle.net/21.11116/0000-0004-CC90-3
Genre: Patent

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 Creators:
Son, HI1, Author              
Kim , YI, Author
Jeon, CJ, Author
Yang, JW, Author
Affiliations:
1External Organizations, ou_persistent22              

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 Abstract: A substrate test unit, a substrate test apparatus having the same, and a substrate test method using the same are provided to fix, transfer and test a substrate, loaded from a first conveyor, by using lower rollers and fixing members corresponding to the lower rollers, and unload the substrate to a second conveyor, thereby minimizing an installation space and reducing manufacturing costs. Lower rollers(200) transfer a substrate(10) in a lower part of the substrate. A fixing member(300) is disposed so as to correspond to the lower rollers and fixes the substrate. A driving device drives the lower rollers by being coupled with the lower rollers. A test unit(400) tests the substrate transferred to a test area by the lower rollers. The fixing member includes upper rollers(310) disposed in an upper part of the substrate so as to respectively correspond to the lower rollers.

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 Dates: 2006-06-082007-12-12
 Publication Status: Published online
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: -
 Identifiers: BibTex Citekey: 6476
Patent Nr.: KR20070117287A
 Degree: -

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