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  Structure of thin CrSi2 films on Si(0 0 1)

Filonenko, O., Falke, M., Hortenbach, H., Henning, A., Beddies, G., & Hinneberg, H.-J. (2004). Structure of thin CrSi2 films on Si(0 0 1). Applied Surface Science, 227(1-4), 341-348. doi:10.1016/j.apsusc.2003.12.011.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0013-D97D-4 Version Permalink: http://hdl.handle.net/21.11116/0000-0005-4F5A-F
Genre: Journal Article

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Filonenko, O, Author
Falke, M, Author
Hortenbach, H, Author
Henning, A1, Author              
Beddies, G, Author
Hinneberg, H-J, Author
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1External Organizations, ou_persistent22              

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 Abstract: The morphology and texture of CrSi2 films grown on Si(0 0 1) is reported. The films have been prepared under ultra high vacuum conditions by reactive codeposition and by the template method. X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM) analyses have been performed to investigate the influence of the substrate temperature and the template thickness on the silicide texture and morphology. XRD evidences that the major part of CrSi2 crystallites grows with an orientation of View the MathML source within all present experiments. Considering the morphology and preferred orientation of the crystallites the substrate temperature of 700 °C is determined to be optimal for the codeposition growth method. A further improvement of the CrSi2(0 0 1) texture and an increase of the grain size by an order of magnitude is observed after deposition of 0.5 nm Cr onto the Si(0 0 1) substrate at room temperature prior to the codeposition of Cr and Si at 700 °C.

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 Dates: 2004-04
 Publication Status: Published in print
 Pages: -
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 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.1016/j.apsusc.2003.12.011
BibTex Citekey: FilonenkoFHHBH2004
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Title: Applied Surface Science
  Abbreviation : Appl. Surf. Sci.
Source Genre: Journal
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Publ. Info: Amsterdam : Elsevier B.V.
Pages: - Volume / Issue: 227 (1-4) Sequence Number: - Start / End Page: 341 - 348 Identifier: ISSN: 0169-4332
CoNE: https://pure.mpg.de/cone/journals/resource/954928576736