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  Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions.

Savran, C. A., Sparks, A. W., Sihler, J., Li, J., Wu, W. C., Berlin, D. E., et al. (2002). Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions. Journal of Microelectromechanical Systems, 11(6), 703-708. doi:10.1109/JMEMS.2002.805057.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0014-9D01-9 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0027-C4F4-F
Genre: Journal Article

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1851321.pdf (Publisher version), 621KB
 
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 Creators:
Savran, C. A., Author
Sparks, A. W., Author
Sihler, J., Author
Li, J., Author
Wu, W. C., Author
Berlin, D. E., Author
Burg, T. P.1, Author              
Fritz, J., Author
Schmidt, M. A., Author
Manalis, S. R., Author
Affiliations:
1Research Group of Biological Micro- and Nanotechnology, MPI for biophysical chemistry, Max Planck Society, ou_578602              

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 Abstract: We have micromachined a mechanical sensor that uses interferometry to detect the differential and absolute deflections of two adjacent cantilevers. The overall geometry of the device allows simple fluidic delivery to each cantilever to immobilize molecules for biological and chemical detection. We show that differential sensing is 50 times less affected by ambient temperature changes than the absolute, thus enabling a more reliable differentiation between specific cantilever bending and background effects. We describe the fabrication process and show results related to the dynamic characterization of the device as a differential sensor. The root-mean-squared (r.m.s.) sensor noise in water and air is ∼1 nm over the frequency range of 0.4-40 Hz. We also find that in air, the deflection resolution is limited only by the cantilever's thermomechanical noise level of 0.008 Å/Hz12/ over the frequency range of 40-1000 Hz.

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Language(s): eng - English
 Dates: 2002-12
 Publication Status: Published in print
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 Rev. Method: Peer
 Identifiers: DOI: 10.1109/JMEMS.2002.805057
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Title: Journal of Microelectromechanical Systems
Source Genre: Journal
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Pages: - Volume / Issue: 11 (6) Sequence Number: - Start / End Page: 703 - 708 Identifier: -