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  Titania-assisted electron-beam and synchrotron lithography

Skorb, E. V., Grützmacher, D., Dais, C., Guzenko, V. A., Sokolov, V. G., Gaevskaya, T. V., et al. (2010). Titania-assisted electron-beam and synchrotron lithography. Nanotechnology, 21(31): 315301.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0015-4AE8-D Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0015-4AE9-B
Genre: Journal Article

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488911.pdf (Publisher version), 2MB
 
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 Creators:
Skorb, E. V.1, Author           
Grützmacher, D., Author
Dais, C., Author
Guzenko, V. A., Author
Sokolov, V. G., Author
Gaevskaya, T. V., Author
Sviridov, D. V., Author
Affiliations:
1Grenzflächen, Max Planck Institute of Colloids and Interfaces, Max Planck Society, ou_1863287              

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Language(s): eng - English
 Dates: 2010-08-06
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 488911
ISI: 000279961200010
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Title: Nanotechnology
  Alternative Title : Nanotechnology
Source Genre: Journal
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Pages: - Volume / Issue: 21 (31) Sequence Number: 315301 Start / End Page: - Identifier: ISSN: 0957-4484