Fabrication of CNT-carbon composite microstructures using Si micromolding and 
pyrolysis

He, L.; Toda, Masaya; Kawai, Y.; Miyashita, H.; Omori, M.; Hashida, T.; Berger, Rüdiger; Ono, T.

doi:10.1007/s00542-013-1771-6

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Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis

He, L., Toda, M., Kawai, Y., Miyashita, H., Omori, M., Hashida, T., et al. (2014). Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis. Microsystem Technologies, 20(2), 201-208. doi:10.1007/s00542-013-1771-6.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0015-8BC7-B Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0015-8BC8-9

Genre: Journal Article

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Creators:
He, L., Author
Toda, Masaya¹, Author
Kawai, Y., Author
Miyashita, H., Author
Omori, M., Author
Hashida, T., Author
Berger, Rüdiger², Author
Ono, T., Author

Affiliations:
1Tohoku Univ, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan, ou_persistent22
2Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society, ou_1800286

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Language(s): eng - English

Dates: Date issued: 2014

Publication Status: Issued

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Identifiers: DOI: 10.1007/s00542-013-1771-6

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Title: Microsystem Technologies

Source Genre: Journal

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Publ. Info: Berlin : Springer-Verlag

Pages: - Volume / Issue: 20 (2) Sequence Number: - Start / End Page: 201 - 208 Identifier: ISSN: 0946-7076
CoNE: https://pure.mpg.de/cone/journals/resource/954925573922