Effects of dielectric barrier discharges on silicon surfaces: Surface 
roughness, cleaning, and oxidation

Michel, B.; Giza, M.; Krumrey, M.; Eichler, M.; Grundmeier, G.; Klages, C. P.

doi:10.1063/1.3088872

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Effects of dielectric barrier discharges on silicon surfaces: Surface roughness, cleaning, and oxidation

Michel, B., Giza, M., Krumrey, M., Eichler, M., Grundmeier, G., & Klages, C. P. (2009). Effects of dielectric barrier discharges on silicon surfaces: Surface roughness, cleaning, and oxidation. Journal of Applied Physics, 105(7): 073302 (9pp). doi:10.1063/1.3088872.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0019-445D-B Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0019-445F-7

Genre: Journal Article

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Creators:
Michel, B., Author
Giza, M.¹, Author
Krumrey, M., Author
Eichler, M., Author
Grundmeier, G.², Author
Klages, C. P., Author

Affiliations:
1Adhesion and Thin Films, Interface Chemistry and Surface Engineering, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863349
2Christian Doppler Laboratory for Metal/Polymer Interfaces, Interface Chemistry and Surface Engineering, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863353

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Language(s): eng - English

Dates: Date issued: 2009

Publication Status: Issued

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Identifiers: eDoc: 498730
DOI: 10.1063/1.3088872

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Title: Journal of Applied Physics

Alternative Title : J. Appl. Phys.

Source Genre: Journal

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Pages: - Volume / Issue: 105 (7) Sequence Number: 073302 (9pp) Start / End Page: - Identifier: -