Formation of mesoscopic structures by the CVD of SiH4 on Fe(100)

Rebhan, Matthias Erwin; Rohwerder, Michael; Stratmann, Martin

doi:10.1002/1521-3862(20021203)8:6<259::AID-CVDE259>3.0.CO;2-8

Local TagsRelease HistoryDetailsSummary

Formation of mesoscopic structures by the CVD of SiH₄ on Fe(100)

Rebhan, M. E., Rohwerder, M., & Stratmann, M. (2002). Formation of mesoscopic structures by the CVD of SiH₄ on Fe(100). Chemical Vapor Deposition, 8(6), 259-261. doi:10.1002/1521-3862(20021203)8:6<259:AID-CVDE259>3.0.CO;2-8.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0019-6D66-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0025-6840-1

Genre: Journal Article

Files

show Files

Locators

show

Creators

show

hide

Creators:
Rebhan, Matthias Erwin^{1, 2}, Author
Rohwerder, Michael^{1, 3}, Author
Stratmann, Martin^{4, 5}, Author

Affiliations:
1Institut für Werkstoffwissenschaften IV, Universität Erlangen, 91058 Erlangen, Germany, ou_persistent22
2Siemens AG, CT D2P, Otto-Hahn-Ring 6, 81730 Munich, Germany, ou_persistent22
3Molecular Structure and Surface Modification, Interface Chemistry and Surface Engineering, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863360
4Interface Chemistry and Surface Engineering, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863348
5Institut für Werkstoffwissenschaften IV, Universität Erlangen, Erlangen, D-91058, Germany, ou_persistent22

Content

show

Details

show

hide

Language(s): eng - English

Dates: Date issued: 2002-12

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: -

Identifiers: eDoc: 124752
DOI: 10.1002/1521-3862(20021203)8:6<259::AID-CVDE259>3.0.CO;2-8

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: Chemical Vapor Deposition

Other : Chem. Vapor Depos.

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: Weinheim : Verlag GmbH & Co. KGaA

Pages: - Volume / Issue: 8 (6) Sequence Number: - Start / End Page: 259 - 261 Identifier: ISSN: 0948-1907
CoNE: https://pure.mpg.de/cone/journals/resource/954925573933