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Title:
Chemical Vapor Deposition
Other
:
Chem. Vapor Depos.
Source Genre:
Journal
Creator(s):
Affiliations:
Publ. Info:
Weinheim : Verlag GmbH & Co. KGaA
Pages:
-
Volume / Issue:
8 (6)
Sequence Number:
-
Start / End Page:
259 - 261
Identifier:
ISSN: 0948-1907
CoNE: https://pure.mpg.de/cone/journals/resource/954925573933