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  A Mechanical Method for Preparing TEM Samples from Brittle Films on Compliant Substrates

Taylor, A. A., Cordill, M. J., Moser, G., & Dehm, G. (2011). A Mechanical Method for Preparing TEM Samples from Brittle Films on Compliant Substrates. Practical Metallography - Praktische Metallographie, 48(8), 408-413. doi:10.3139/147.110113.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-001A-2835-7 Version Permalink: http://hdl.handle.net/21.11116/0000-0001-8FFA-5
Genre: Journal Article

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 Creators:
Taylor, Aidan Arthur1, Author              
Cordill, Megan Jo2, Author              
Moser, Gabriele3, Author              
Dehm, Gerhard4, Author              
Affiliations:
1Erich Schmid Institute of Materials Science, Austrian Academy of Sciences and Department Material Physics, University of Leoben, JahnstraGe 12, A-8700 Leoben, Austria, ou_persistent22              
2Washington State University, Pullman, WA, USA, ou_persistent22              
3Erich-Schmid-Institute of Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, 8700 Leoben, Austria, ou_persistent22              
4Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Leoben, Austria, ou_persistent22              

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 Abstract: Preparing transmission electron microscopy (TEM) samples from thin films is technically challenging and traditional preparation routes can sometimes introduce unacceptable artefacts or even prove impossible. A novel method of preparing plan view TEM samples from thin films by a purely mechanical method is assessed. Two examples of films prepared by this route are briefly presented, a Cr film on PET and an amorphous AlxOy film on Cu. The application of this method allows for TEM analysis of the Cr film without the problems associated with a polymer such as PET disintegrating under the electron beam. For the AlxOy films it is demonstrated that this purely mechanical preparation prevents crystallisation of the film resulting from conventional ion milling preparation routes. The technique also allows for an upper bound of thickness approximation for these films.

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Language(s): eng - English
 Dates: 2011-08
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: Peer
 Identifiers: DOI: 10.3139/147.110113
 Degree: -

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Title: Practical Metallography - Praktische Metallographie
Source Genre: Journal
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Publ. Info: München : Carl Hanser Verlag
Pages: - Volume / Issue: 48 (8) Sequence Number: - Start / End Page: 408 - 413 Identifier: ISSN: 0032-678X
CoNE: /journals/resource/954925435452