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  Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays

Keskinbora, K., Robisch, A.-L., Mayer, M., Grévent, C., Szeghalmi, A. V., Knez, M., et al. (2013). Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays. Proceedings of SPIE (The International Society for Optical Engineering), 8851: 885119. doi:10.1117/12.2027251.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0019-B97D-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0019-B97E-7
Genre: Journal Article

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 Creators:
Keskinbora, K.1, Author           
Robisch, A.-L.2, Author
Mayer, M.1, Author           
Grévent, C.1, Author           
Szeghalmi, A. V.3, Author
Knez, M.4, Author
Weigand, M.1, Author           
Snigireva, I.5, Author
Snigirev, A.5, Author
Salditt, T.2, Author
Schütz, G.1, Author           
Affiliations:
1Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497648              
2Institut für Röntgenphysik, Universität Göttingen, Göttingen, Germany, ou_persistent22              
3Friedrich-Schiller-University Jena, Jena, Germany, ou_persistent22              
4CIC nanoGune Consolider, Spain, ou_persistent22              
5European Synchrotron Radiation Facility, France, ou_persistent22              

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Free keywords: Abt. Schütz
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Language(s): eng - English
 Dates: 2013
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1117/12.2027251
 Degree: -

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Title: Proceedings of SPIE (The International Society for Optical Engineering)
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 8851 Sequence Number: 885119 Start / End Page: - Identifier: -