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  Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation – An alternate approach

Sudhir, D., Bandyopadhyay, M., Kraus, W., Gahlaut, A., Bansal, G., & Chakraborty, A. (2014). Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation – An alternate approach. Review of Scientific Instruments, 85: 013510. doi:10.1063/1.4863098.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0019-C113-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0025-B75E-5
Genre: Journal Article

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http://dx.doi.org/10.1063/1.4863098 (Publisher version)
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 Creators:
Sudhir, D.1, Author
Bandyopadhyay, M.1, Author
Kraus, W.2, Author           
Gahlaut, A.1, Author
Bansal, G.1, Author
Chakraborty, A.1, Author
Affiliations:
1External Organizations, ou_persistent22              
2ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856290              

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Language(s): eng - English
 Dates: 2014
 Publication Status: Issued
 Pages: 8 p.
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1063/1.4863098
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Title: Review of Scientific Instruments
Source Genre: Journal
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Publ. Info: Melville, NY : AIP Publishing
Pages: - Volume / Issue: 85 Sequence Number: 013510 Start / End Page: - Identifier: ISSN: 0034-6748
CoNE: https://pure.mpg.de/cone/journals/resource/991042742033452