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Title:
AIP Conference Proceedings
Subtitle
:
20th Topical Conference on Radio Frequency Power in Plasmas, Sorrento, 2013-06-25 to 2013-06-28
Source Genre:
Journal
Creator(s):
Affiliations:
Publ. Info:
Melville, NY : AIP Publishing
Pages:
-
Volume / Issue:
1580
Sequence Number:
-
Start / End Page:
105 - 112
Identifier:
ISSN: 0094-243X
CoNE: https://pure.mpg.de/cone/journals/resource/954928528968