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  Enabling technologies for system-level simulation of MEMS

Bechtold, T., Schrag, G., & Feng, L. (2014). Enabling technologies for system-level simulation of MEMS. In Electronics System-Integration Technology Conference (ESTC), 2014 (pp. 1-6).

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0024-6628-E Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0025-1FF7-1
Genre: Conference Paper

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 Creators:
Bechtold, Tamara1, Author
Schrag, Gabriele2, Author
Feng, Lihong3, Author              
Affiliations:
1Institute for Microsystems Engineering - IMTEK, Freiburg University, Germany, ou_persistent22              
2Institute for Physics of Electrotechnology, Technische Universität München, Germany, ou_persistent22              
3Computational Methods in Systems and Control Theory, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society, ou_1738141              

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 Dates: 2014
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: -
 Identifiers: DOI: 10.1109/ESTC.2014.6962795
 Degree: -

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Title: Electronics System-Integration Technology Conference (ESTC 2014)
Place of Event: Helsinki, Finland
Start-/End Date: 2014-09-16 - 2014-09-18

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Title: Electronics System-Integration Technology Conference (ESTC), 2014
Source Genre: Proceedings
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 1 - 6 Identifier: -