Interface fracture and chemistry of a tungsten-based metallization on 
borophosphosilicate glass

Völker, Bernhard; Heinz, Walther; Matoy, Kurt; Roth, R.; Batke, Johann Markus; Schöberl, Thomas; Scheu, Christina; Dehm, Gerhard

doi:10.1080/14786435.2014.913108

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Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

Völker, B., Heinz, W., Matoy, K., Roth, R., Batke, J. M., Schöberl, T., et al. (2015). Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass. Philosophical Magazine, 95(16-18), 1967-1981. doi:10.1080/14786435.2014.913108.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0024-B8AC-0 Version Permalink: https://hdl.handle.net/21.11116/0000-0001-6D45-8

Genre: Journal Article

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Creators:
Völker, Bernhard^{1, 2}, Author
Heinz, Walther³, Author
Matoy, Kurt⁴, Author
Roth, R.⁵, Author
Batke, Johann Markus⁶, Author
Schöberl, Thomas⁷, Author
Scheu, Christina⁸, Author
Dehm, Gerhard⁹, Author

Affiliations:
1Department of Materials Physics, Montanuniversität Leoben, Austria, ou_persistent22
2KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH, Technologiepark Villach, Europastrasse 8, 9524 Villach, Austria, ou_persistent22
3Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, A-9524 Villach, Austria, ou_persistent22
4Infineon Technologies AG Austria, Villach, Austria, ou_persistent22
5Infineon Technologies AG, 9500 Villach, Austria, ou_persistent22
6Infineon Technologies AG, 93049 Regensburg, Germany, ou_persistent22
7Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, A-8700 Leoben, Austria, ou_persistent22
8Department of Chemistry and Center for NanoScience (CeNS), Ludwig-Maximilians Universität München, Germany, ou_persistent22
9Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863398

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Language(s): eng - English

Dates: Accepted: 2014-04-03Published Online: 2014-05-13Date issued: 2015

Publication Status: Issued

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Rev. Type: Peer

Identifiers: DOI: 10.1080/14786435.2014.913108

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Title: Philosophical Magazine

Abbreviation : Philos. Mag.

Source Genre: Journal

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Publ. Info: Milton Park, Abingdon, England : Taylor & Francis

Pages: - Volume / Issue: 95 (16-18) Sequence Number: - Start / End Page: 1967 - 1981 Identifier: ISSN: 1478-6435
CoNE: https://pure.mpg.de/cone/journals/resource/954925265237