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  Field emission beam characteristics of single metal nanotip cathodes with on-chip collimation gate electrode

Lee, C., Das Kanungo, P., Guzenko, V., Hefenstein, P., Miller, R. J. D., & Tsujino, S. (2015). Field emission beam characteristics of single metal nanotip cathodes with on-chip collimation gate electrode. Journal of Vacuum Science and Technology B, 33(3): 03C111. doi:10.1116/1.4913397.

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© American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
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http://dx.doi.org/10.1116/1.4913397 (Publisher version)
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 Creators:
Lee, Chiwon1, 2, 3, Author              
Das Kanungo, Pratyush2, Author
Guzenko, Vitaliy2, Author
Hefenstein, Patrick2, Author
Miller, R. J. Dwayne1, 3, 4, Author              
Tsujino, Soichiro2, Author
Affiliations:
1Miller Group, Atomically Resolved Dynamics Department, Max Planck Institute for the Structure and Dynamics of Matter, Max Planck Society, ou_1938288              
2Laboratory for Micro and Nanotechnology, Paul Scherrer Institute, Villigen 5232, Switzerland, ou_persistent22              
3CFEL, Luruper Chaussee 149, 22761 Hamburg, Germany, ou_persistent22              
4Departments of Chemistry and Physics, University of Toronto, 80 St. George Street Toronto, Ontario M5S 3H6, Canada, ou_persistent22              

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Free keywords: Germanium; Field emission; Collimation; Cathodes; Field emitters
 Abstract: Field-emission and beam collimation characteristics of single metal nanotip devices with double-gate electrodes are studied. Applying a previously developed method to fabricate all-metal double-gate nanotip arrays with a stacked on-chip extraction Gext and collimation Gcol gate electrodes with the large Gcol apertures, the authors produced single double-gate nanotip devices and measured their beam characteristics. Excellent beam collimation capability with minimal reduction of the emission current and the enhancements of the current density up to a factor of ∼7 was observed. The results indicate that these single nanotip devices are highly promising for electron beam applications that require extremely high brilliance and coherence.

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Language(s): eng - English
 Dates: 2014-12-082015-02-042015-02-262015-05
 Publication Status: Published in print
 Pages: 6
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1116/1.4913397
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Title: Journal of Vacuum Science and Technology B
  Other : JVST B
  Other : J. Vac. Sci. Techn. B
Source Genre: Journal
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Publ. Info: New York : Published by AVS through the American Institute of Physics
Pages: - Volume / Issue: 33 (3) Sequence Number: 03C111 Start / End Page: - Identifier: ISSN: 0734-2101
CoNE: https://pure.mpg.de/cone/journals/resource/954928495416