English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
  Die Rolle von Ionen und Radikalen bei der plasmagestützten Abscheidung amorpher wasserstoffhaltiger Kohlenstoffschichten

Lange, K.(1995). Die Rolle von Ionen und Radikalen bei der plasmagestützten Abscheidung amorpher wasserstoffhaltiger Kohlenstoffschichten (IPP 9/106). Garching: Max-Planck-Institut für Plasmaphysik.

Item is

Basic

show hide
Genre: Report
Alternative Title : The role of ions and radicals in plasma-enhanced deposition of amorphous hydrogenatd carbon films

Files

show Files
hide Files
:
IPP-9-106.pdf (Any fulltext), 3MB
Name:
IPP-9-106.pdf
Description:
-
Visibility:
Public
MIME-Type / Checksum:
application/pdf / [MD5]
Technical Metadata:
Copyright Date:
-
Copyright Info:
eDoc_access: PUBLIC
License:
-

Locators

show

Creators

show
hide
 Creators:
Lange, K.1, Author              
Affiliations:
1External Organizations, ou_persistent22              

Content

show

Details

show
hide
Language(s): deu - German
 Dates: 1995
 Publication Status: Published in print
 Pages: 132 p.
 Publishing info: Garching : Max-Planck-Institut für Plasmaphysik
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 378700
Report Nr.: IPP 9/106
 Degree: -

Event

show

Legal Case

show

Project information

show

Source

show