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  Messung und Modellierung absoluter Radikaldichten in einem ECR-Methanplasma.

Engelhard, M.(1993). Messung und Modellierung absoluter Radikaldichten in einem ECR-Methanplasma. (IPP 4/262). Garching (DE): Max-Planck-Institut für Plasmaphysik.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-636C-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-636D-6
Genre: Report

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IPP_4_262.1.pdf (Any fulltext), 158MB
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 Creators:
Engelhard, M.1, Author           
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1External Organizations, ou_persistent22              

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Language(s): deu - German
 Dates: 1993
 Publication Status: Published in print
 Pages: 125 pp.
 Publishing info: Garching (DE) : Max-Planck-Institut für Plasmaphysik
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 655337
Report Nr.: IPP 4/262
 Degree: -

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