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  Sputtering studies with the Monte-Carlo program trim SP

Eckstein, W.(1983). Sputtering studies with the Monte-Carlo program trim SP (IPP 9/41). Garching: Max-Planck-Institut für Plasmaphysik.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-693B-4 Version Permalink: https://hdl.handle.net/21.11116/0000-000F-37E7-F
Genre: Report

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IPP-9-41.pdf (Any fulltext), 8MB
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 Creators:
Eckstein, W.1, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Language(s): eng - English
 Dates: 1983
 Publication Status: Issued
 Pages: -
 Publishing info: Garching : Max-Planck-Institut für Plasmaphysik
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 668195
Report Nr.: IPP 9/41
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