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  Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization. Invited paper

Gans, T., Osiac, M., O'Connell, D., Kadetov, V. A., Czarnetzki, U., Schwarz-Selinger, T., et al. (2005). Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization. Invited paper. Plasma Physics and Controlled Fusion, 47(5A), A353-A360. Retrieved from http://www.iop.org/EJ/abstract/0741-3335/47/5A/026.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1693-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1694-5
Genre: Journal Article

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 Creators:
Gans, T.1, Author
Osiac, M.1, Author
O'Connell, D.1, Author
Kadetov, V. A.1, Author
Czarnetzki, U.1, Author
Schwarz-Selinger, T.2, 3, Author           
Halfmann, H.1, Author
Awakowicz, P.1, Author
Affiliations:
1Institute for Plasma and Atomic Physics, CPST, Ruhr-Univ. Bochum, 44780 Bochum; Institute for Electrical Engineering and Plasma Technology, CPST, Ruhr-Univ. Bochum, 44780 Bochum, ou_persistent22              
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Free keywords: 12th International Congress on Plasma Physics, 2004-10-25 to 2004-10-29
 Abstract: -

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Language(s): eng - English
 Dates: 2005
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 220885
URI: http://www.iop.org/EJ/abstract/0741-3335/47/5A/026
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Title: Plasma Physics and Controlled Fusion
  Alternative Title : PPCF
Source Genre: Journal
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Publ. Info: -
Pages: - Volume / Issue: 47 (5A) Sequence Number: - Start / End Page: A353 - A360 Identifier: -