Silver metal organic chemical vapor deposition for advanced silver metallization

Gao, L.; Härter, P.; Linsmeier, C.; Wiltner, A.; Emling, R.; Schmitt-Landsiedel, D.

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Silver metal organic chemical vapor deposition for advanced silver metallization

Gao, L., Härter, P., Linsmeier, C., Wiltner, A., Emling, R., & Schmitt-Landsiedel, D. (2005). Silver metal organic chemical vapor deposition for advanced silver metallization. Microelectronic Engineering, 82, 296-300.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1AC8-4 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1AC9-2

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Urheber:
Gao, L.¹, Autor
Härter, P.², Autor
Linsmeier, C.³, Autor
Wiltner, A.³, Autor
Emling, R.², Autor
Schmitt-Landsiedel, D.², Autor

Affiliations:
1External Organizations, ou_persistent22
2Institute for Technical Electronics, Technical University Munich, Munich; Institute for Inorganic Chemistry, Technical University Munich, Munich, ou_persistent22
3Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328