Silver metal organic chemical vapor deposition for advanced silver metallization

Gao, L.; Härter, P.; Linsmeier, C.; Wiltner, A.; Emling, R.; Schmitt-Landsiedel, D.

Local TagsRelease HistoryDetailsSummary

Silver metal organic chemical vapor deposition for advanced silver metallization

Gao, L., Härter, P., Linsmeier, C., Wiltner, A., Emling, R., & Schmitt-Landsiedel, D. (2005). Silver metal organic chemical vapor deposition for advanced silver metallization. Microelectronic Engineering, 82, 296-300.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1AC8-4 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1AC9-2

Genre: Journal Article

Files

show Files

Locators

show

Creators

show

hide

Creators:
Gao, L.¹, Author
Härter, P.², Author
Linsmeier, C.³, Author
Wiltner, A.³, Author
Emling, R.², Author
Schmitt-Landsiedel, D.², Author

Affiliations:
1External Organizations, ou_persistent22
2Institute for Technical Electronics, Technical University Munich, Munich; Institute for Inorganic Chemistry, Technical University Munich, Munich, ou_persistent22
3Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328

Content

show

Details

show

hide

Language(s): eng - English

Dates: Date issued: 2005

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: Peer

Identifiers: eDoc: 289788

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: Microelectronic Engineering

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: -

Pages: - Volume / Issue: 82 Sequence Number: - Start / End Page: 296 - 300 Identifier: -