Depth characterization of nm-layers by low energy ion scattering

Draxler, M.; Markin, S. N.; Beikler, R.; Taglauer, E.; Kastner, F.; Bergsmann, M.; Bauer, P.

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Depth characterization of nm-layers by low energy ion scattering

Draxler, M., Markin, S. N., Beikler, R., Taglauer, E., Kastner, F., Bergsmann, M., et al. (2004). Depth characterization of nm-layers by low energy ion scattering. Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms, 219-220, 578-583. Retrieved from http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TJN-4BRKXPB-3W-K&_cdi=5315&_user=100196&_orig=browse&_coverDate=06%2F30%2F2004&_sk=997809999&view=c&wchp=dGLbVzz-zSkWW&md5=5f66f63f4bfd133efc4970b9f3185089&ie=/sdarticle.pdf.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1C39-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1C3A-5

Genre: Journal Article

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Creators:
Draxler, M.¹, Author
Markin, S. N.¹, Author
Beikler, R.², Author
Taglauer, E.³, Author
Kastner, F.¹, Author
Bergsmann, M.¹, Author
Bauer, P.², Author

Affiliations:
1Institut für Experimentalphysik, Johannes Kepler Universität Linz, Altenbergerstrasse 69, A-4040 Linz, Austria. Hueck Folien GmbH, A-4342 Baumgartenberg, Austria., ou_persistent22
2External Organizations, ou_persistent22
3Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328

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Free keywords: 16th International Conference on Ion Beam Analysis, Albuquerque,NM, 2003-06-29 to 2003-07-04

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Language(s): eng - English

Dates: Date issued: 2004

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 126512
URI: http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TJN-4BRKXPB-3W-K&_cdi=5315&_user=100196&_orig=browse&_coverDate=06%2F30%2F2004&_sk=997809999&view=c&wchp=dGLbVzz-zSkWW&md5=5f66f63f4bfd133efc4970b9f3185089&ie=/sdarticle.pdf

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Title: Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms

Alternative Title : NIM B

Source Genre: Journal

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Pages: - Volume / Issue: 219-220 Sequence Number: - Start / End Page: 578 - 583 Identifier: ISSN: 0168-583X