Particle-beam experiment to study heterogeneous surface reactions relevant to 
plasma-assisted thin film growth and etching

Jacob, W.; Hopf, C.; von Keudell, A.; Meier, M.; Schwarz-Selinger, T.

doi:10.1063/1.1628845

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Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching

Jacob, W., Hopf, C., von Keudell, A., Meier, M., & Schwarz-Selinger, T. (2003). Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching. Review of Scientific Instruments, 74(12), 5123-5136. doi:10.1063/1.1628845.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-3DBE-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-3DBF-C

Genre: Journal Article

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Creators:
Jacob, W.^{1, 2}, Author
Hopf, C.^{1, 2}, Author
von Keudell, A.^{1, 2}, Author
Meier, M.^{1, 2}, Author
Schwarz-Selinger, T.^{1, 2}, Author

Affiliations:
1Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 2003

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 60877
DOI: 10.1063/1.1628845
URI: http://ojps.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=RSINAK000074000012005123000001&idtype=cvips
Other: CIPS Reprint No. 137

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Title: Review of Scientific Instruments

Alternative Title : Rev. Sci. Instrum.

Source Genre: Journal

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Pages: - Volume / Issue: 74 (12) Sequence Number: - Start / End Page: 5123 - 5136 Identifier: -