New fit formulae for the sputtering yield

Eckstein, W.; Preuss, R.

doi:10.1016/S0022-3115(03)00192-2

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New fit formulae for the sputtering yield

Eckstein, W., & Preuss, R. (2003). New fit formulae for the sputtering yield. Journal of Nuclear Materials, 320, 209-213. doi:10.1016/S0022-3115(03)00192-2.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-3DCF-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-3DD0-2

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Creators:
Eckstein, W.¹, Author
Preuss, R.^{2, 3}, Author

Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
3Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325

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Language(s): eng - English

Dates: Date issued: 2003

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 61092
DOI: 10.1016/S0022-3115(03)00192-2
URI: http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TXN-48PDH1S-3-2D&_cdi=5595&_orig=browse&_coverDate=08%2F01%2F2003&_sk=996799996&view=c&wchp=dGLbVtz-zSkzV&_acct=C000007558&_version=1&_userid=100196&md5=130fe0f8b9b736f673fa87dc72d8c157&ie=f.pdf
Other: CIPS Reprint No. 117

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Title: Journal of Nuclear Materials

Alternative Title : J. Nucl.Mater.

Source Genre: Journal

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Pages: - Volume / Issue: 320 Sequence Number: - Start / End Page: 209 - 213 Identifier: -