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  Solid Ion Source Based on Hollow-Cylindrical Magnetron Sputtering Discharges

Azarenkov, N. A., Bizyukov, A. A., Bizyukov, I. A., Bobkov, V. V., Kashaba, A. Y., Krieger, K., et al. (2003). Solid Ion Source Based on Hollow-Cylindrical Magnetron Sputtering Discharges. Voprosy Atomnoj Nauki i Techniki, Serijya Fizika Plazmy, 9, 125-127.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0027-3DF6-0 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0027-3DF7-E
Genre: Journal Article

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 Creators:
Azarenkov, N. A., Author
Bizyukov, A. A., Author
Bizyukov, I. A.1, Author              
Bobkov, V. V.2, Author              
Kashaba, A. Y., Author
Krieger, K.1, Author              
Sereda, K. N., Author
Tarasov, I. K., Author
Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              
2Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318              

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Language(s): eng - English
 Dates: 2003
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 111856
 Degree: -

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Title: Voprosy Atomnoj Nauki i Techniki, Serijya Fizika Plazmy
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 9 Sequence Number: - Start / End Page: 125 - 127 Identifier: -