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  Chemische Zerstäubung und ioneneunterstütztes Wachstum amorpher Kohlenwasserstoffschichten . Experimente mit Teilchenstrahlen. Chemical Sputtering and Ion-enhanced Growth of Amorphous Hydrocarbon Films - a Particle-beam Experiment

Hopf, C.(2003). Chemische Zerstäubung und ioneneunterstütztes Wachstum amorpher Kohlenwasserstoffschichten. Experimente mit Teilchenstrahlen. Chemical Sputtering and Ion-enhanced Growth of Amorphous Hydrocarbon Films - a Particle-beam Experiment (IPP 9/134). Garching: Max-Planck-Institut für Plasmaphysik.

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 Creators:
Hopf, C.1, 2, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325              

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Language(s): deu - German
 Dates: 2003
 Publication Status: Published in print
 Pages: 102 S.
 Publishing info: Garching : Max-Planck-Institut für Plasmaphysik
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 284933
Report Nr.: IPP 9/134
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