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  Surface mass transport and island nucleation during growth of Ge on laser textured Si(001)

Schwarz-Selinger, T., Foo, Y. L., Cahill, D. G., & Greene, J. E. (2002). Surface mass transport and island nucleation during growth of Ge on laser textured Si(001). Physical Review B, 65(12): 125317.

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 Creators:
Schwarz-Selinger, T.1, 2, Author           
Foo, Y. L.3, Author
Cahill, D. G.3, Author
Greene, J. E.3, Author
Affiliations:
1Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325              
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
3Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA, ou_persistent22              

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 Abstract: Substrates with controlled surface morphologies are used to quantify the kinetics of surface mass transport during Stranski-Krastanov growth of epitaxial nanostructures. Morphologies are modified by laser texturing; tightly focused nanosecond laser pulses are used to produce micron-scale dimples on the surface of Si(001) substrates. The areal densities of three-dimensional Ge islands formed by chemical vapor deposition on these modified substrates is measured by atomic force microscopy for a wide range of Ge coverages (3-10 ML), temperatures (500<T<700 degreesC), and deposition rates (0.003<F<0.3 ML s(-1)). Island nucleation is enhanced at the vicinal surfaces surrounding the rim of the laser dimples, and, as a consequence, a denuded zone with a reduced island density surrounds each dimple. The width of the denuded zone can be as large as 50 times the island spacing and is created by extensive mass transport during the formation of the wetting layer. Mass transport is driven by chemical-potential gradients associated with the wetting-layer thickness, substrate vicinality, and the elastic relaxation of three-dimensional islands. We find excellent agreement between the data and a one-dimensional model calculation of diffusion and nucleation; the fit to the model gives a transport rate of Dn(0)approximate to1.5x10(5) s(-1) at 600 degreesC and an activation energy E- f+E(m)approximate to1.3 eV.</textarea> </td> <TD ALIGN="left" WIDTH="10%"> <A HREF="javascript:window.open('http://edoc.mpg.de/addon.epl?mode=methelp&whgen=3&whele=abstract','','scrollbars');void('')" ><img src="images/hilfe.gif" border="0" /></a> </td></tr> <tr><TD ALIGN="right" WIDTH="30%">

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Language(s): eng - English
 Dates: 2002-03-15
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 21207
ISI: 000174938800065
 Degree: -

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Title: Physical Review B
  Alternative Title : Phys. Rev. B
Source Genre: Journal
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Pages: - Volume / Issue: 65 (12) Sequence Number: 125317 Start / End Page: - Identifier: ISSN: 0163-1829