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  Depth profiles and resolution limits in accelerator-based solid state analysis

Fischer, R. (2002). Depth profiles and resolution limits in accelerator-based solid state analysis. Analytical and Bioanalytical Chemistry, 374(4), 619-625.

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 Creators:
Fischer, R.1, 2, Author              
Affiliations:
1Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325              
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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 Abstract: A ubiquitous problem in solid state analysis is the determination of the elemental composition of a sample as a function of the depth. The determination of the depth profiles from ion-beam experiments is an ill-posed inversion problem due to ion-beam and detector-induced energy spreads as well as energy-loss straggling and small-angle scattering effects. The inversion problem is solved in the framework of Bayesian probability theory, which provides a method for quantifying and combining uncertain data and uncertain additional information. By deconvolving the apparatus transfer function and modeling the scattering events in the sample we reconstructed depth profiles of C-13 in tetrahedral amorphous carbon (ta-C) and depth profiles in C-12/C-13 marker probes. An enhancement of the energy resolution by a factor of 6 was obtained.

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Language(s): eng - English
 Dates: 2002
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 20464
ISI: 000179404400009
 Degree: -

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Title: Analytical and Bioanalytical Chemistry
  Alternative Title : Anal. Bioanal. Chem.
Source Genre: Journal
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Publ. Info: -
Pages: - Volume / Issue: 374 (4) Sequence Number: - Start / End Page: 619 - 625 Identifier: ISSN: 16182642