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Schlagwörter:
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Zusammenfassung:
ECR hydrocarbon laboratory plasmas are modeled using both a simple zero dimensional particle balance model and a fully kinetic model. The kinetic model consists of a 2-dimensional in space, 3-dimensional in velocity space Particle-in-Cell model with Monte-Carlo collisions in which electrons, ions and neutrals are treated as particles, moving in self-consistent electric and external magnetic fields. The model results are discussed and compared with experimental data.
