Formation of polymer-like Hydrocarbon films from radical beams of Methyl and 
atomic Hydrogen : Invited Review

von Keudell, A.

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Formation of polymer-like Hydrocarbon films from radical beams of Methyl and atomic Hydrogen : Invited Review

von Keudell, A. (2002). Formation of polymer-like Hydrocarbon films from radical beams of Methyl and atomic Hydrogen: Invited Review. Thin Solid Films, 402, 1-37.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-44C1-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-44C2-7

Genre: Journal Article

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Creators:
von Keudell, A.^{1, 2}, Author

Affiliations:
1Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 2002

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 228527
Other: CIPS Reprint No. 72

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Title: Thin Solid Films

Source Genre: Journal

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Pages: - Volume / Issue: 402 Sequence Number: - Start / End Page: 1 - 37 Identifier: -