Quantification of a radial beam source for methyl radicals

Schwarz-Selinger, T.; Dose, V.; Jacob, W.; von Keudell, A.

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Quantification of a radial beam source for methyl radicals

Schwarz-Selinger, T., Dose, V., Jacob, W., & von Keudell, A. (2001). Quantification of a radial beam source for methyl radicals. Journal of Vacuum Science and Technology. A, 19, 101-107. Retrieved from http://scitation.aip.org/dbt/dbt.jsp?KEY=JVSTAL.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-457F-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-4580-2

Genre: Journal Article

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Creators:
Schwarz-Selinger, T.^{1, 2}, Author
Dose, V.², Author
Jacob, W.^{1, 2}, Author
von Keudell, A.^{1, 2}, Author

Affiliations:
1Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 2001

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 254538
Other: CIPS Reprint No. 36
URI: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVSTAL

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Title: Journal of Vacuum Science and Technology. A

Source Genre: Journal

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Pages: - Volume / Issue: 19 Sequence Number: - Start / End Page: 101 - 107 Identifier: ISSN: 0734-2101