Passive und aktive Absorptionsspektroskopie an Silizium in Randschichtplasmen

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Passive und aktive Absorptionsspektroskopie an Silizium in Randschichtplasmen

Altmann, I. (2001). Passive und aktive Absorptionsspektroskopie an Silizium in Randschichtplasmen. PhD Thesis, Universität Stuttgart, Stuttgart.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-495E-7 Version Permalink: https://hdl.handle.net/21.11116/0000-0006-C23E-A

Genre: Thesis

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Creators:
Altmann, I.¹, Author

Affiliations:
1Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856293

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Language(s): deu - German

Dates: Accepted: 2001Date issued: 2001

Publication Status: Issued

Pages: -

Publishing info: Stuttgart : Universität Stuttgart

Table of Contents: -

Rev. Type: -

Identifiers: -

Degree: PhD

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