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Title:
Radio Frequency Power in Plasmas: 14th Topical Conference
Source Genre:
Book
Creator(s):
Mau, T.K., Editor
De Grassie, J., Editor
Affiliations:
-
Publ. Info:
Melville,NY : American Institute of Physics (AIP)
Pages:
-
Volume / Issue:
-
Sequence Number:
-
Start / End Page:
59 - 66
Identifier:
ISBN: 0-7354-0038-5