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  Carbide formation in tungsten-containing amorphous carbon films by annealing

Balden, M., Sauter, P. A., Jong, S., Adelhelm, C., Lindig, S., Rasinski, M., et al. (2011). Carbide formation in tungsten-containing amorphous carbon films by annealing. Thin Solid Films, 519(12), 4049-4053. doi:10.1016/j.tsf.2011.01.403.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-E93A-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-E93B-D
Genre: Journal Article

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 Creators:
Balden, M.1, 2, Author           
Sauter, P. A.1, 2, Author           
Jong, S.1, 2, Author           
Adelhelm, C.1, 2, Author           
Lindig, S.1, 2, Author           
Rasinski, M.1, 2, Author           
Plocinski, T.3, Author
Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              
2Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327              
3Warsaw University of Technology, Faculty of Material Science and Engineering, Woloska 141, 02–507, Poland, ou_persistent22              

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Free keywords: E-MRS Spring Meeting 2010, Symposium L: Carbon- or Nitrogen-containing Nanostructured Composite Films, Strasbourg, 2010-06-07 to 2010-06-11
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Language(s): eng - English
 Dates: 2011
 Publication Status: Published in print
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 479467
DOI: 10.1016/j.tsf.2011.01.403
URI: http://dx.doi.org/10.1016/j.tsf.2011.01.403
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Title: Thin Solid Films
Source Genre: Journal
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Publ. Info: Elsevier B.V.
Pages: - Volume / Issue: 519 (12) Sequence Number: - Start / End Page: 4049 - 4053 Identifier: -