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  Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio-Frequency Oxygen Plasmas

Dittmann, K., Matyash, K., Nemschokmichal, S., Meichsner, J., & Schneider, R. (2010). Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio-Frequency Oxygen Plasmas. Contributions to Plasma Physics, 50(10), 942-953. doi:10.1002/ctpp.201000038.

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 Creators:
Dittmann, K., Author
Matyash, K.1, Author           
Nemschokmichal, S., Author
Meichsner, J., Author
Schneider, R.1, Author           
Affiliations:
1Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856287              

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Language(s): eng - English
 Dates: 2010
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Degree: -

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Title: Contributions to Plasma Physics
Source Genre: Journal
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Publ. Info: WILEY-VCH Verlag GmbH & Co. KGaA
Pages: - Volume / Issue: 50 (10) Sequence Number: - Start / End Page: 942 - 953 Identifier: -