Simulation of ion energy distributions in Ar/CH4 rf discharges with ion 
extraction

Ikkurthi, V.; Matyash, K.; Meichsner, J.; Melzer, A.; Schneider, R.

doi:10.1088/0963-0252/18/3/035003

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Simulation of ion energy distributions in Ar/CH₄ rf discharges with ion extraction

Ikkurthi, V., Matyash, K., Meichsner, J., Melzer, A., & Schneider, R. (2009). Simulation of ion energy distributions in Ar/CH₄ rf discharges with ion extraction. Plasma Sources Science and Technology, 18: 035003 (7pp). doi:10.1088/0963-0252/18/3/035003.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-F5A6-B Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-F5A7-9

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Urheber:
Ikkurthi, V.¹, Autor
Matyash, K.^{2, 3}, Autor
Meichsner, J.¹, Autor
Melzer, A.¹, Autor
Schneider, R.^{2, 4}, Autor

Affiliations:
1Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, 17489 Greifswald, ou_persistent22
2Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856287
3Helmholtz Junior Research Group 'Computational Material Science' (Junior Research Group HGF-Greifswald), Max Planck Institute for Plasma Physics, Max Planck Society
4Helmholtz Junior Research Group 'Computational Material Science' (Junior Research Group HFG-Greifswald), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856336