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  Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition

Adelhelm, C., Pickert, T., Balden, M., Rasinski, M., Plocinski, T., Ziebert, C., et al. (2009). Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition. Scripta Materialia, 61(8), 789-792. doi:10.1016/j.scriptamat.2009.06.031.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-F5C6-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-F5C7-0
Genre: Journal Article

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 Creators:
Adelhelm, C.1, Author           
Pickert, T.1, Author           
Balden, M.1, Author           
Rasinski, M.1, Author           
Plocinski, T.2, Author
Ziebert, C.2, Author
Koch, F.1, Author           
Maier, H.3, Author
Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              
2Faculty of Materials Science and Engineering, Warsaw University of Technology, ul. Woloska 141, 02-507 Warsaw, Poland; Forschungszentrum Karlsruhe, Institute for Materials Research I, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, ou_persistent22              
3Max Planck Society, ou_persistent13              

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Language(s): eng - English
 Dates: 2009
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 429962
DOI: 10.1016/j.scriptamat.2009.06.031
URI: http://dx.doi.org/doi:10.1016/j.scriptamat.2009.06.031
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Title: Scripta Materialia
Source Genre: Journal
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Publ. Info: Elsevier B.V.
Pages: - Volume / Issue: 61 (8) Sequence Number: - Start / End Page: 789 - 792 Identifier: -