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  Sputtering Yields

Eckstein, W. (2008). Sputtering Yields. Vacuum, 82(9), 930-934. doi:10.1016/j.vacuum.2007.12.004.

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 Creators:
Eckstein, W.1, Author              
Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              

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Free keywords: 18th Ion Surface Interactions Conference, Zvenigorod, 2007-08-24 to 2007-08-28
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Language(s): eng - English
 Dates: 2008
 Publication Status: Published in print
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 Rev. Type: Peer
 Identifiers: eDoc: 362282
DOI: 10.1016/j.vacuum.2007.12.004
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Title: Vacuum
Source Genre: Journal
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Publ. Info: Elsevier
Pages: - Volume / Issue: 82 (9) Sequence Number: - Start / End Page: 930 - 934 Identifier: -