Plasma Boundary Sheath in the Afterglow of a Pulsed Inductively Coupled RF 
Plasma

Osiac, M.; Schwarz-Selinger, T.; O'Connell, D.; Heil, B.; Petrovic, Z. L.; Turner, M. M.; Gans, T.; Czarnetzki, U.

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Plasma Boundary Sheath in the Afterglow of a Pulsed Inductively Coupled RF Plasma

Osiac, M., Schwarz-Selinger, T., O'Connell, D., Heil, B., Petrovic, Z. L., Turner, M. M., et al. (2007). Plasma Boundary Sheath in the Afterglow of a Pulsed Inductively Coupled RF Plasma. Plasma Sources Science Technology, 16, 355-363. Retrieved from http://dx.doi.org/10.1088/0963-0252/16/2/019.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-07BE-2 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-07BF-F

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Urheber:
Osiac, M.¹, Autor
Schwarz-Selinger, T.², Autor
O'Connell, D.¹, Autor
Heil, B.¹, Autor
Petrovic, Z. L.¹, Autor
Turner, M. M.¹, Autor
Gans, T.¹, Autor
Czarnetzki, U.¹, Autor

Affiliations:
1Institute for Plasma and Atomic Physics, CPST, Ruhr-University Bochum, Bochum 44780, Germany; Institute of Physics Belgrade, Zemun POB 68 Zemun 11080, Serbia; National Centre for Plasma Science and Technology, Dublin City University, Dublin 9, Ireland; Faculty of Physics, University of Craiova, Craiova, Romania; Institute for Electrical Engineering and Plasma Technology, CPST, Ruhr-University Bochum, 44780 Bochum, Germany; Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK, ou_persistent22
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328