Molybdenum angular sputtering distribution under low energy xenon ion 
bombardment

Oyarzabal, E.; Yu, J. H.; Doerner, R. P.; Tynan, G. R.; Schmid, K.

Local TagsRelease HistoryDetailsSummary

Molybdenum angular sputtering distribution under low energy xenon ion bombardment

Oyarzabal, E., Yu, J. H., Doerner, R. P., Tynan, G. R., & Schmid, K. (2006). Molybdenum angular sputtering distribution under low energy xenon ion bombardment. Journal of Applied Physics, 100: 063301. Retrieved from http://dx.doi.org/10.1063/1.2336502.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-10FB-6 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-10FC-4

Genre: Journal Article

Files

show Files

Locators

show

Creators

show

hide

Creators:
Oyarzabal, E.¹, Author
Yu, J. H.², Author
Doerner, R. P.², Author
Tynan, G. R.², Author
Schmid, K.¹, Author

Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328
2Center for Energy Research, University of California at San Diego, La Jolla, California 92093, ou_persistent22

Content

show

Details

show

hide

Language(s): eng - English

Dates: Date issued: 2006

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: Peer

Identifiers: eDoc: 320099
URI: http://dx.doi.org/10.1063/1.2336502

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: Journal of Applied Physics

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: -

Pages: - Volume / Issue: 100 Sequence Number: 063301 Start / End Page: - Identifier: -