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  Quantitative determination of mass-resolved ion densities in H2-Ar inductively coupled radio frequency plasmas

Sode, M., Schwarz-Selinger, T., & Jacob, W. (2013). Quantitative determination of mass-resolved ion densities in H2-Ar inductively coupled radio frequency plasmas. Journal of Applied Physics, 113: 093304 (18pp). doi:10.1063/1.4794165.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-DD84-6 Version Permalink: https://hdl.handle.net/21.11116/0000-0001-DEC5-7
Genre: Journal Article

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http://dx.doi.org/10.1063/1.4794165 (Publisher version)
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 Creators:
Sode, M.1, Author           
Schwarz-Selinger, T.1, Author           
Jacob, W.1, Author           
Affiliations:
1Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327              

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Language(s): eng - English
 Dates: 2013
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 628459
DOI: 10.1063/1.4794165
URI: http://dx.doi.org/10.1063/1.4794165
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Title: Journal of Applied Physics
Source Genre: Journal
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Publ. Info: American Institute of Physics
Pages: - Volume / Issue: 113 Sequence Number: 093304 (18pp) Start / End Page: - Identifier: -