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  Operational limit of a planar DC magnetron cluster source due to target erosion

Rai, A., Mutzke, A., Bandelow, G., Schneider, R., Ganeva, M., Pipa, A., et al. (2013). Operational limit of a planar DC magnetron cluster source due to target erosion. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 316, 6-12. doi:10.1016/j.nimb.2013.08.027.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0026-DF26-6 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0026-DF27-4
Genre: Journal Article

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 Creators:
Rai, A.1, Author              
Mutzke, A.2, Author              
Bandelow, G.3, Author
Schneider, R.1, Author              
Ganeva, M.4, Author
Pipa, A.4, Author
Hippler, R.4, Author
Affiliations:
1External Organizations, ou_persistent22              
2Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856287              
3Max Planck Society, ou_persistent13              
4University of Erlangen–Nuernberg, Institute of Science and Technology of Metals, Martensstrasse 5, D-91058 Erlangen, Germany; Institute of Physics, Ernst-Moritz-Arndt-University Greifswald, Felix-Hausdorff-Str. 6, D-17489 Greifswald, Germany; Leibniz Institute for Plasma Science and Technology (INP Greifswald), Felix-Hausdorff-Str. 2, D-17489 Greifswald, Germany, ou_persistent22              

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Language(s): eng - English
 Dates: 2013
 Publication Status: Published in print
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Source Genre: Journal
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Publ. Info: Elsevier B.V.
Pages: - Volume / Issue: 316 Sequence Number: - Start / End Page: 6 - 12 Identifier: -