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  Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass

Völker, B., Heinz, W., Matoy, K., Roth, R., Batke, J. M., Schöberl, T., et al. (2015). Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass. Thin Solid Films, 583, 170-176. doi:10.1016/j.tsf.2015.03.047.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0026-B626-5 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0026-B627-3
Genre: Journal Article

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 Creators:
Völker, Bernhard1, 2, Author              
Heinz, Walther3, Author              
Matoy, Kurt4, Author              
Roth, R.5, Author              
Batke, Johann Markus6, Author              
Schöberl, Thomas7, Author              
Cordill, Megan Jo8, Author              
Dehm, Gerhard9, Author              
Affiliations:
1KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH, Technologiepark Villach, Europastrasse 8, 9524 Villach, Austria, ou_persistent22              
2Department of Materials Physics, Montanuniversität Leoben, Austria, ou_persistent22              
3Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, A-9524 Villach, Austria, ou_persistent22              
4Infineon Technologies AG Austria, Villach, Austria, ou_persistent22              
5Infineon Technologies AG, 9500 Villach, Austria, ou_persistent22              
6Infineon Technologies AG, 93049 Regensburg, Germany, ou_persistent22              
7Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, A-8700 Leoben, Austria, ou_persistent22              
8Erich Schmid Institute of Materials Science, Leoben, Austria, ou_persistent22              
9Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863398              

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Language(s): eng - English
 Dates: 2015-05-29
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: -
 Identifiers: DOI: 10.1016/j.tsf.2015.03.047
 Degree: -

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Title: Thin Solid Films
  Abbreviation : Thin Solid Films
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 583 Sequence Number: - Start / End Page: 170 - 176 Identifier: ISSN: 0040-6090
CoNE: /journals/resource/954925449792