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Title:
Resonant MEMS: fundamentals, implementation, and application
Source Genre:
Book
Creator(s):
Brand, O., Editor
Dufour, I., Editor
Heinrich, S., Editor
Josse, F., Editor
Affiliations:
-
Publ. Info:
Weinheim : Wiley-VCH
Pages:
-
Volume / Issue:
-
Sequence Number:
-
Start / End Page:
261 - 286
Identifier:
ISBN: 978-3-527-33545-9